Description
Microscope Mount and Movement
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Stable bridge for high quality optics
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Linear Z lift for easy reconfiguration
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25 x 25 mm air bearing or 50 x 50 mm linear XY movement
Adjustable Platen Height
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Micrometer control for precise adjustment
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20 mm range for various applications
Probe Platen
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Stable and rigid design
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Supports DC/CV and RF measurements
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Rectangular adjustments for RF positioners
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Designed for maximum thermal stability
RF Calibration
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2 auxiliary chucks for calibration substrates
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Built-in ceramic for accurate calibration
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1 μm flatness for consistent contact quality
Unique Platen Lift
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Three discrete positions for contact, separation (300 μm) and safety loading (3 mm)
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Safety lock function at loading position
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“Auto Contact“ position with ±1 μm repeatability for consistent contact quality
Ultra Small Footprint
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Designed for bench top use
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Comes with vibration absorber base
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Low profile design for maximum usability
- Ideal for load pull applications
featuring:
- Microscope Mount and Movement incl unique Air Bearing for fast XY navigation
- Microscope and Optics Options
- Adjustable Platen Height
- Probe Platen support DC/CV and RF; designed for maximum thermal stability
- Unique Platen Lift
- Thermal Chuck Integration
- Modular Chucks
- Chuck XY-Theta Stage Movement
- up to 4 RF and 10 RFpositioners; dedicated probe arms ( coax, triax, Kelvin, RF )
- RF Calibration
- Ultra Small Footprint
Available Options:
- Vibration Isolation Platform
- EMI-shielded Darkbox
- Vacuum pump and air compressor unit
- Table with integrated rack for thermal controller, computer and keyboard push tray