TS150-HP

Microscope Mount and Movement

• Stable bridge for high quality optics
• Linear z lift for easy reconfiguration
• 25 x 25 mm air bearing or 50 x 50 mm linear XY movement

Adjustable Platen Height

• Micrometer control for precise adjustment
• 20 mm range for various applications

Probe Platen

• Stable and rigid design
• Supports DC/CV, RF and High Power measurements
• Rectangular adjustments for RF positioners
• Designed for maximum thermal stability

Unique Platen Lift

• Three discrete positions for contact, separation (300 µm) and safety loading (3 mm)
• Safety lock function at loading position
• “Auto Contact“ position with ±1 µm repeatability for consistent contact quality

Platen Arc Shield

• Designed for safe operation
• Prevents platen high voltage arching from chuck

Front Mounted Vacuum Control

• Easy access
• Clearly marked

Microscope and Optics Options

• Various optics options available
• Stereo MPI ST45 or single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
• High Power microscopes FS70/PSM-1000
• HDMI cameras, monitor user interface without computer

Positioners and High Power Probes

• Supports up to 4 high current and 8 high voltage positioners
• Various positioners available
• Dedicated Coax and Triax high voltage and high current probe arms (up to 600 A pulse) Modular Chucks
• Various non-thermal and thermal chucks
• Wide range of temperature up to 300°C
• Thin wafer handling capability
• 10 kV (Coax), 3 kV (Triax)
• Gold plated for low contact resistance
• MPI chuck connectors for safe instrument connection

Chuck XY Stage Movement

• Unique puck controlled air bearing stage for quick single-handed operation
• 180 x 230 mm XY total stage movement
• Resolution < 1.0 µm (0.04 mils) @ 500 µm/rev • Extra wide Y-range for easy loading
• ±5° Theta fine adjustment